Photodetectors
AssigneeRegents of the University of Minnesota
InventorsSang-Hyun Oh, Daehan Yoo
Life of this patent
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Abstract
The subject matter of this specification can be embodied in, among other things, a photodetector that includes a semiconductor substrate, a semiconductor annulus on a planar face of the semiconductor substrate, and a metal layer on the semiconductor substrate, wherein the metal layer comprises a first region surrounding the semiconductor annulus and comprises a second region filling an interior region to the semiconductor annulus, and the metal layer in the first region forms a Schottky junction with the semiconductor ring.
Claims27
A photodetector comprising:
- a semiconductor substrate;
- a semiconductor annulus on a planar face of the semiconductor substrate;
- and
- a metal layer on the semiconductor substrate, wherein the metal layer comprises a first region surrounding the semiconductor annulus and comprises a second region filling an interior region to the semiconductor annulus, and the metal layer in the first region forms a Schottky junction with the semiconductor annulus, and the metal layer in the second region defined by the semiconductor annulus is configured to form one or more resonant epsilon-near-zero modes for transmission of photons;
- wherein the photodetector is configured to convert photons having wavelengths between 2 microns and 30 microns to electrical current.
A method of fabricating a photodetector, the method comprising:
- providing a semiconductor substrate;
- forming a semiconductor annulus on a planar face of the semiconductor substrate;
- and
- forming a metal layer on the planar face of the semiconductor substrate, wherein the metal layer comprises:
- a first region surrounding the semiconductor annulus and forms a Schottky junction with the semiconductor annulus;
- and
- a second region filling an interior region to the semiconductor annulus and configured to form one or more resonant epsilon-near-zero modes for transmission of photons, wherein the photodetector is configured to convert photons having wavelengths between 2 microns and 30 microns to electrical current.
Dependencies are inferred from the claim text.