A process for fabricating a field-effect transistor including an active zone comprising a source, a channel, a drain, and a control gate, which is positioned level with said channel, allowing a flow of charge carriers in the channel to be controlled, comprising the following steps:
- producing the field-effect transistor including the source, the channel, the drain and a sacrificial gate above the channel, the channel being compressively or tensilely strained;
- depositing a dielectric layer to encapsulate the field-effect transistor with a dielectric;
- selectively etching the sacrificial gate so as to define a gate cavity through the encapsulating dielectric layer;
- depositing a block copolymer layer comprising a first species and a second species in the gate cavity having a source-side first internal wall and a drain-side second internal wall;
- removing the first or second species so as to define masking patterns positioned facing at least one of the walls and opening onto the bottom of the gate cavity;
- producing one or more perforations in the channel facing said wall or said walls;
- depositing at least one gate material in the gate cavity facing the perforated channel,
- wherein the process comprises the depositing of a neutralizing layer prior to the deposition of the block copolymer layer, so as to allow the one or more perforations in the channel to be given a preferred orientation.