Semiconductor device and method for manufacturing the same
AssigneeKioxia Corporation
InventorYasuhiro Uchiyama
Life of this patent
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Abstract
According to one embodiment, a semiconductor device includes a substrate, a logic circuit provided on the substrate, and a memory cell array provided over the logic circuit that includes a plurality of electrode layers stacked on top of one another and a semiconductor layer provided over the plurality of electrode layers. The semiconductor device further includes a first plug and a second plug provided above the logic circuit and electrically connected to the logic circuit, a bonding pad provided on the first plug, and a metallic wiring layer provided on the memory cell array, electrically connected to the semiconductor layer, and electrically connected to the second plug.
Claims10
A semiconductor device comprising:
- a substrate;
- a first transistor provided on the substrate;
- a memory cell array provided above the first transistor and including a plurality of electrode layers stacked in a first direction, and a source line layer provided above the plurality of electrode layers and including a doped semiconductor layer;
- a first plug provided above the first transistor, extending in the first direction, and electrically connected to the first transistor;
- and
- a metallic wiring layer provided above the memory array, connected to the source line layer, and including a first portion provided on the first plug, wherein
- the memory cell array includes a first region and a second region,
- the first region include a first pillar containing a first channel semiconductor layer and a second pillar containing a second channel semiconductor layer,
- the second region includes a third plug in contact with one of the plurality of electrode layers,
- the first channel semiconductor layer and the second channel semiconductor layer are in contact with the doped semiconductor layer,
- the metallic wiring layer includes, in the first region, a second portion and a third portion connected to the second portion,
- the second portion is in contact with the source line layer,
- the third portion is not in contact with the source line layer, and
- the second portion has a part located in a position in the first direction nearer to the uppermost layer of the plurality of electrode layers than the third portion.
Dependencies are inferred from the claim text.