Laser irradiation apparatus
AssigneeJsw Aktina System Co., Ltd.
InventorYuki Suzuki
Life of this patent
Estimating the term…
Abstract
In a laser irradiation apparatus 1 according to one embodiment, each of first and second flotation units 30a, 30b includes a base 31, and a porous plate 32 bonded to an upper surface of the base 31 by an adhesive layer 34, the base 31 includes a rising portion 312 protruding upward at an outer periphery facing at least the gap, and the porous plate 32 includes a cutout portion 321 configured to fit to the rising portion 312, and the adhesive layer 34 is formed along an inner wall of the rising portion 312 having fitted to the cutout portion 321.
Claims15
A laser irradiation apparatus comprising:
- first and second flotation units configured to each blow a gas upward and float a workpiece of a plate shape, and aligned at a predetermined interval;
- and
- a laser irradiation unit configured to irradiate the workpiece with a laser beam from an upper side in a gap between the first flotation unit and the second flotation unit, the workpiece being floated and conveyed from the first flotation unit to the second flotation unit in a conveyance direction, wherein
- each of the first and second flotation units includes:
- a base, and
- a porous plate bonded to an upper surface of the base by an adhesive layer,
- the base includes a rising portion protruding upward at an outer periphery facing at least the gap, and the porous plate includes a cutout portion configured to fit to the rising portion, the cutout portion reducing a width of the porous plate along an upward direction, wherein a length of the porous plate in the conveyance direction is the same as a length of the base including the rising portion in the conveyance direction, and
- the adhesive layer is formed along an inner wall of the rising portion having fitted to the cutout portion,
- wherein the rising portion is formed at the entire outer periphery of the base, and
- wherein the porous plate overlaps an upper surface of the rising portion.
A laser irradiation apparatus comprising:
- first and second flotation units configured to each blow a gas upward and float a workpiece of a plate shape, and aligned at a predetermined interval;
- and
- a laser irradiation unit configured to irradiate the workpiece with a laser beam from an upper side in a gap between the first flotation unit and the second flotation unit, the workpiece being floated and conveyed from the first flotation unit to the second flotation unit in a conveyance direction, wherein
- each of the first and second flotation units includes:
- a base, and
- a porous plate bonded to an upper surface of the base by an adhesive layer,
- the base includes a rising portion protruding upward at an outer periphery facing at least the gap, and the porous plate includes a cutout portion configured to fit to the rising portion, and
- the adhesive layer is formed along an inner wall of the rising portion having fitted to the cutout portion,
- wherein
- the porous plate is divided into a first plate and a second plate in a longitudinal direction,
- a protrusion portion is formed on a lower side of a butting end surface of the first plate with respect to the second plate, and a protrusion portion is formed on an upper side of a butting end surface of the second plate with respect to the first plate, and
- the first plate and the second plate are adhered between the protrusion portion of the first plate and the protrusion portion of the second plate.
Dependencies are inferred from the claim text.