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US 11,688,592 B2Granted
Photocathode, electron tube, and method for manufacturing photocathode
AssigneeHamamatsu Photonics K.K.
InventorsTerunori Kawai, Yoshitaka Torii, Masami Shibayama, Hiroyuki Watanabe, Shinichi Yamashita
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Abstract
A photocathode including a substrate, a photoelectric conversion layer provided on the substrate and generating photoelectrons in response to incidence of light, and an underlayer provided between the substrate and the photoelectric conversion layer and containing beryllium, in which the underlayer has a first underlayer containing a nitride of beryllium.
Claims19
A photocathode comprising:
- a substrate;
- a photoelectric conversion layer provided on the substrate and configured to generate photoelectrons in response to incidence of light;
- and
- an underlayer provided between the substrate and the photoelectric conversion layer and containing beryllium, wherein
- the underlayer has a first underlayer containing a nitride of beryllium.
2 more elements
A method for manufacturing a photocathode, the method comprising:
- a first step of preparing a substrate;
- a second step of forming an underlayer containing beryllium on the substrate;
- and
- a third step of forming a photoelectric conversion layer configured to generate photoelectrons in response to incidence of light on the underlayer, wherein
- the second step has
- a forming step of forming an intermediate layer containing a nitride of beryllium on the substrate, and
- a treatment step of performing an oxidation treatment with respect to the intermediate layer so as to form a first underlayer provided on the substrate and containing a nitride of beryllium and a second underlayer provided on the first underlayer and containing an oxide of beryllium as the underlayer.
4 more elements
Dependencies are inferred from the claim text.