Apparatus for transmission electron microscopy cathodoluminescence

An apparatus for collection and analysis of cathodoluminescence (CL) light produced by a transmission electron microscopy (TEM) sample in an electron microscope comprising:

• a first collection mirror positioned to collect CL light emitted by the sample on a sample surface directly exposed to entry of an electron beam;
• a second collection mirror positioned to collect CL light emitted by the sample on a sample surface wherein said electron beam exits the sample
• a spectrograph having an entrance plane, said spectrograph being configured to produce a light spectrum comprising a two-dimensional image of light intensity where one axis of said image corresponds to light wavelength and the other axis corresponds to a spatial coordinate of the light entering the entrance plane of said spectrograph;
• a first fiber-optic-cable having a first receiving end arranged to carry said first CL light reflected from said sample by said first collection mirror, and a first transmitting end arranged to couple said first CL light into said spectrograph;
• a second fiber-optic-cable having a second receiving end arranged to carry said second CL light reflected from said sample by said second collection mirror, and a second transmitting end arranged to couple said second CL light into said spectrograph;
• wherein said first and second transmitting ends are positioned such that said spectrograph produces a first light spectrum for said first fiber-optic-cable and a separate light spectrum for said second fiber-optic-cable.