US 11,688,557 B2Granted

Capacitor and etching method

AssigneeKabushiki Kaisha Toshiba

InventorsKazuhito Higuchi, Kazuo Shimokawa, Susumu Obata, Mitsuo Sano

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Abstract

According to an embodiment, a capacitor includes a conductive substrate, a conductive layer, a dielectric layer therebetween, and first and second internal electrodes. The substrate has first and second main surfaces. One partial region of the first main surface is provided with first recesses. A region of the second surface corresponding to a combination of the one partial region and another partial region is provided with second recesses. The conductive layer covers the main surfaces and side walls and bottom surfaces of the recesses. The first internal electrode is provided on the one partial region and electrically connected to the conductive layer. The second internal electrode is provided on the another partial region and electrically connected to the substrate.

Claims4

Dependent claims

A capacitor comprising:

a conductive substrate having a first main surface and a second main surface, one of partial regions of the first main surface being provided with one or more first recesses, and a region of the second surface corresponding to a combination of the one of the partial regions of the first main surface and another one of the partial regions of the first main surface being provided with one or more second recesses;
a conductive layer covering the first main surface, the second main surface, side walls and bottom surfaces of the one or more first recesses, and side walls and bottom surfaces of the one or more second recesses;
a dielectric layer interposed between the conductive substrate and the conductive layer;
a first internal electrode provided on the one of the partial regions of the first main surface and electrically connected to the conductive layer;
and
a second internal electrode provided on the another one of the partial regions of the first main surface and electrically connected to the conductive substrate.

3 more elements

Dependencies are inferred from the claim text.