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US 11,688,413 B2Granted
Method and system for audio recognition of arcing during semiconductor process
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorChih-Yu Wang
Life of this patent
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Abstract
An arcing detection system detects arcing within a semiconductor processing cleanroom environment. The arcing detection system includes an array of microphones positioned within the cleanroom environment. The microphones receive soundwaves within the cleanroom environment and generate audio signals based on the sound waves. The arcing system includes a control system that receives the audio signals from the microphones. The control system analyzes the audio signals and detects arcing within the cleanroom environment based on the audio signals. The control system can adjust a semiconductor process in real time responsive to detecting arcing.
Claims20
A method comprising:
- performing a semiconductor process on a semiconductor wafer positioned in a semiconductor processing cleanroom environment;
- generating audio signals from sound waves with an array of microphones positioned in the semiconductor processing cleanroom environment, wherein the array of microphones includes a plurality of groups of microphones, wherein each group of microphones includes a first microphone sensitive to sounds in a first frequency range including infrasonic sound, a second microphone sensitive to sounds in a second frequency range different than the first frequency range and including audible frequencies, and a third microphone sensitive to sounds in a third frequency range different than the first and second frequency ranges and including ultrasonic frequencies, wherein the first microphone is not sensitive to at least a portion of the second frequency range and the third frequency range, wherein the second microphone is not sensitive to at least a portion of the first and third frequency ranges, wherein the third microphone is not sensitive to at least a portion of the first and second frequency ranges;
- filtering, with a plurality of first filters each coupled to a respective group of microphones, the audio signals;
- processing the audio signals with a control system, wherein processing the audio signals includes filtering one or more frequency bands from the audio signals with at least one second filter;
- detecting arcing within the semiconductor processing cleanroom environment with the control system based on the audio signals;
- determining, with the control system, whether the arcing is dangerous to the semiconductor wafer;
- if the control system determines that the arcing is dangerous:
- adjusting, with the control system, parameters of the semiconductor process responsive to detecting the arcing;
- and
- continuing the semiconductor process with adjusted parameters after detecting the arcing without stopping the semiconductor process;
- and
- if the control system determines that the arcing is not dangerous, continuing performing the semiconductor process without adjusting parameters of the semiconductor process.
9 more elements
A system, comprising:
- a plurality of microphones positioned within a semiconductor processing cleanroom environment and configured to detect sounds within the semiconductor processing cleanroom environment and to generate audio signals based on the sounds, wherein the plurality of microphones includes a plurality of groups of microphones, wherein each group of microphones includes a first microphone sensitive to sounds in a first frequency range including infrasonic frequencies, a second microphone sensitive to sounds in a second frequency range different than the first frequency range and including audible frequencies, and a third microphone sensitive to sounds in third frequency range different than the first and second frequency ranges and including ultrasonic frequencies, wherein the first microphone is not sensitive to at least a portion of the second frequency range and the third frequency range, wherein the second microphone is not sensitive to at least a portion of the first and third frequency ranges, wherein the third microphone is not sensitive to at least a portion of the first and second frequency ranges;
- a plurality of first filters each coupled to a respective group of microphones;
- and
- a control system communicatively coupled to the plurality of microphones and configured to detect arcing during a semiconductor process within the semiconductor processing cleanroom environment based on the audio signals, wherein the control system is configured to:
- determine whether the arcing is dangerous to a semiconductor wafer undergoing a semiconductor process within the semiconductor processing cleanroom environment;
- if the control system determines that the arcing is dangerous, adjust the semiconductor process responsive to detecting the arcing and without stopping the semiconductor process;
- and
- if the control system determines that the arcing is not dangerous, continue performing the semiconductor process without adjusting parameters of the semiconductor process, wherein the control system includes a second filter configured to filter one or more frequency bands from the audio signals.
5 more elements
A method, comprising:
- performing a semiconductor process on a semiconductor wafer in a semiconductor processing cleanroom environment;
- converting sounds to audio signals during the semiconductor process with a plurality of microphones positioned in the semiconductor processing cleanroom environment, wherein the array of microphones includes a plurality of groups of microphones, wherein each group of microphones includes a first microphone sensitive to sounds in a first frequency range including infrasonic frequencies, a second microphone sensitive to sounds in a second frequency range different than the first frequency range and including audible frequencies, and a third microphone sensitive to sounds in third frequency range different than the first and second frequency ranges and including ultrasonic frequencies, wherein the first microphone is not sensitive to at least a portion of the second frequency range and the third frequency range, wherein the second microphone is not sensitive to at least a portion of the first and third frequency ranges, wherein the third microphone is not sensitive to at least a portion of the first and second frequency ranges;
- filtering, with a plurality of first filters each coupled to a respective group of microphones, the audio signals;
- detecting, with a control system, arcing within the semiconductor processing cleanroom environment by processing the audio signals with a control system, wherein the control system includes a second filter configured to filter one or more frequency bands from the audio signals;
- if the control system determines that the arcing is likely to have damaged the semiconductor wafer, adjusting the semiconductor process within the semiconductor processing cleanroom environment responsive to detecting arcing within the semiconductor processing cleanroom environment without interrupting the semiconductor process;
- if the control system determines that the arcing is not likely to have damaged the semiconductor wafer, continuing performing the semiconductor process without adjusting the semiconductor process.
3 more elements
Dependencies are inferred from the claim text.