Methods and systems for detecting defects in devices using X-rays

A method comprising, by an automated high-speed X-ray inspection system:

• generating a first X-ray image of an inspected sample at a first direction, wherein the first X-ray image is a high-resolution grayscale image, wherein the first direction is substantially orthogonal to a plane of the inspected sample;
• identifying, from a plurality of elements of the inspected sample, one or more elements of interest of the inspected sample based on the first X-ray image, wherein the first X-ray image comprises a plurality of interfering elements from the plurality of elements that interfere with the one or more elements of interest in the first X-ray image;
• determining, for each of the one or more elements of interest, one or more first features associated with the respective element of interest, wherein the one or more first features are determined based on variations of grayscale values in the first X-ray images;
• determining, for each of the one or more elements of interest, whether one or more defects are associated with the respective element of interest based on the one or more first features associated with the element of interest;
• wherein the automated high-speed X-ray inspection system comprises an X-ray source emitting an X-ray beam with a white spectrum and one or more X-ray filters filtering out respective spectrum ranges of the X-ray beam, and wherein the one or more X-ray filters comprise a first X-ray filter corresponding to a first spectrum range being responsive to a first material and a second X-ray filter corresponding to a second spectrum range being responsive to a second material, and generating a first material selective X-ray image with the first X-ray filter being applied to the X-ray source, wherein the first material selective X-ray image excludes elements made of the first material, and generating a second material selective X-ray image with the second X-ray filter being applied to the X-ray source, wherein the second material selective X-ray image excludes elements made of the second material;
• and
• generating an enhanced X-ray image by combining the first material selective X-ray image and the second material selective image, wherein the enhanced X-ray image have a higher signal-to-noise ratio than the first X-ray image.