Method for automated critical dimension measurement on a substrate for display manufacturing, method of inspecting a large area substrate for display manufacturing, apparatus for inspecting a large area substrate for display manufacturing and method of operating thereof

A method for automated critical dimension measurement on a substrate for display manufacturing, comprising:

• scanning a first field of view having a first size with a charged particle beam to obtain a first image having a first resolution of a first portion of the substrate for display manufacturing, the substrate being a large area substrate;
• determining a pattern and a first position of the pattern within the first image, wherein the first position is determined by pattern recognition techniques based on a structure of the pattern;
• scanning a second field of view with the charged particle beam to obtain a second image of a second portion of the substrate, the second field of view has a second size smaller than the first size and has a second position different than the first position, the second image has a second resolution higher than the first resolution;
• determining a critical dimension of a first structure provided on the substrate from the second image wherein the second image is provided at a first orientation, the first orientation determined to have a length expanding along the critical dimension of the first structure and a width corresponding to a number of scan lines to be measured;
• scanning a third field of view with the charged particle beam to obtain a third image of a third portion of the substrate, the third field of view has a third size smaller than the first size and has a third position provided relative to the first position, the third image has a third resolution higher than the first resolution;
• and
• determining a further critical dimension of a second structure provided on the substrate from the third image, the critical dimension of the second structure in the third image being determined at a second orientation different than the first orientation;
• the second image being within the first image.