Method for producing a radiation-emitting component, and radiation-emitting component
AssigneeOSRAM OLED GmbH
InventorAlexander Schlehahn
Life of this patent
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Abstract
The invention relates a method for producing a radiation-emitting component including a step A, in which a laser having an optical resonator and an output mirror is provided, wherein during the intended operation, laser radiation exits the optical resonator via the output mirror. In a step B), a photoresist layer is applied to the output mirror. In a step C), an optical structure is generated from the photoresist layer by means of a 3D lithography method, wherein the optical structure is designed to influence the beam path of the laser radiation by refraction and/or reflection.
Claims15
A method for producing a radiation-emitting component, comprising the steps:
- A) providing a laser having an optical resonator and an output mirror, via which laser radiation from the optical resonator exits during the intended operation;
- A2) applying a first interface layer to the output mirror;
- B) applying a 3D photoresist layer to the first interface layer;
- C) generating an optical structure in the 3D photoresist layer by a 3D lithography process, wherein the optical structure is configured to influence the beam path of the laser radiation by refraction and/or reflection,
- wherein the 3D photoresist layer is at a distance of at least 1 μm from the output mirror,
- wherein the first interface layer and the optical structure are composed of different materials,
- wherein a plurality of optical structures are each produced by the 3D lithography process, the plurality of optical structures form a wavelength-selective optical element having a plurality of single layers with parallel sides arranged one behind the other and intermediate spaces between the individual layers,
- wherein two optical structures of the plurality of optical structures are created from two photoresist layers applied consecutively and one behind the other in the beam direction, the photoresist layer applied further away from the output mirror is only applied after the optical structure has been created in the photoresist layer applied closer to the output mirror.
A radiating-emitting component, comprising:
- a laser having an optical resonator and an output mirror, via which a laser radiation from the optical resonator exits during an intended operation;
- an interface layer on the output mirror;
- and
- an optical structure spaced at a distance by the interface layer from the output mirror, wherein
- the optical structure is designed to influence a beam path of the laser radiation emerging from the output mirror by refraction and/or reflection,
- the optical structure comprises a cured photoresist material,
- wherein the interface layer and the optical structure are composed of different materials,
- wherein the optical structure is a wavelength-selective optical element having a plurality of single layers with parallel sides arranged one behind another, and intermediate spaces between the individual layers.
A method for producing a radiation-emitting component, the method comprising:
- providing a laser having an optical resonator and an output mirror, via which laser radiation from the optical resonator exits during the intended operation;
- applying a first interface layer to the output mirror;
- applying a 3D photoresist layer to the first interface layer;
- generating an optical structure in the 3D photoresist layer by a 3D lithography process, wherein the optical structure is configured to influence the beam path of the laser radiation by refraction and/or reflection,
- wherein the 3D photoresist layer is at a distance of at least 1 μm from the output mirror,
- wherein the optical structure is a wavelength-selective optical element having a plurality of single layers with parallel sides arranged one behind another, and intermediate spaces between the individual layers.
Dependencies are inferred from the claim text.