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US 11,686,986 B2Granted
Display substrate, method for manufacturing display substrate, and display device
AssigneesHefei Boe Optoelectronics Technology Co., Ltd., Boe Technology Group Co., Ltd.
InventorsNa Zhao, Xianxue Duan, Miao Yuan
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Abstract
Disclosed are a display substrate, a fabrication method for the display substrate, and a display device. By arranging a flat layer with a flat surface facing the second metal layer between a first metal layer and a second metal layer, the second metal layer deposited on the flat layer is also relatively flat, so that the second metal wirings with the same width and spacing as that of first metal wirings can be formed. The etching resolutions of the metal wirings in the fanout region corresponding to the first metal layer and the second metal layer in the solutions of the present disclosure can be the same.
Claims16
A display substrate, comprising a substrate provided with a fanout region;
- the display substrate comprises a first metal layer, a flat layer, and a second metal layer which are sequentially formed on the substrate;
- an orthographic projection of the flat layer on the substrate at least covers an orthographic projection of the fanout region on the substrate;
- in the fanout region, a surface, furthest from the substrate, of the flat layer comprises a highest point having a maximum distance to a horizontal plane where the substrate is located and a lowest point having a minimum distance to the horizontal plane where the substrate is located, and a difference between the maximum distance and the minimum distance is less than or equal to 1000 angstroms;
- and
- the first metal layer comprises a plurality of first metal wirings located in the fanout region, the second metal layer comprises a plurality of second metal wirings located in the fanout region, and an orthographic projection of the first metal wirings on the substrate at least partially overlaps with an orthographic projection of the second metal wirings on the substrate;
- wherein the display substrate further comprises a second insulating layer located between the flat layer and the second metal layer, wherein an orthographic projection of the second insulating layer on the substrate at least covers the orthographic projection of the fanout region on the substrate;
- wherein the substrate further comprises a display region located at one side of the fanout region, the first metal layer comprises a gate electrode located in the display region, and the second metal layer comprises a source electrode and a drain electrode which are located in the display region;
- an orthographic projection of the flat layer on the substrate also covers an orthographic projection of the display region on the substrate, and the orthographic projection of the second insulating layer on the substrate also covers the orthographic projection of the display region on the substrate;
- the display substrate further comprises a first transparent conductive layer located between the second insulating layer and the second metal layer, a passivation layer located on one side, deviating from the substrate, of the second metal layer, and a second transparent conductive layer located on one side, deviating from the substrate, of the passivation layer;
- and
- the first transparent conductive layer is electrically connected with the drain electrode, the second transparent conductive layer comprises a plurality of transparent signal lines located in the display region, and an orthographic projection of the first transparent conductive layer on the substrate overlaps with an orthographic projection of the plurality of the transparent signal lines on the substrate.
8 more elements
A method for manufacturing a display substrate, comprising:
- providing a substrate;
- wherein the substrate comprises a fanout region;
- forming a first metal layer on the substrate;
- wherein the first metal layer comprises a plurality of first metal wirings located in the fanout region;
- forming a flat layer on one side, deviating from the substrate, of the first metal layer;
- wherein an orthographic projection of the flat layer on the substrate at least covers an orthographic projection of the fanout region on the substrate;
- in the fanout region, a surface, furthest from the substrate, of the flat layer comprises a highest point having a maximum distance to a horizontal plane where the substrate is located and a lowest point having a minimum distance to the horizontal plane where the substrate is located, and a difference between the maximum distance and the minimum distance is less than or equal to 1000 angstroms;
- and
- forming a second metal layer on one side, deviating from the substrate, of the flat layer;
- wherein the second metal layer comprises a plurality of second metal wirings located in the fanout region, and an orthographic projection of the first metal wirings on the substrate at least partially overlaps with an orthographic projection of the second metal wirings on the substrate;
- wherein the forming the plurality of the first metal wirings comprises:
- coating one side, deviating from the substrate, of the first metal layer with a first photoresist layer;
- and
- exposing and developing the first photoresist layer to form the plurality of the first metal wirings;
- the forming the plurality of the second metal wirings comprises:
- coating one side, deviating from the substrate, of the second metal layer with a second photoresist layer;
- and
- exposing and developing the second photoresist layer to form the plurality of the second metal wirings corresponding to the plurality of the first metal wirings.
15 more elements
Dependencies are inferred from the claim text.