Photonic semiconductor device and method of manufacture

A package comprising:

• a silicon waveguide on a substrate, the silicon waveguide comprising a first grating coupler;
• a semiconductor device and a first dielectric layer over the silicon waveguide;
• a first substrate bonded to the semiconductor device and the first dielectric layer;
• a fiber holder coupled to the first substrate, the fiber holder comprising a prism;
• and
• a channel in the fiber holder configured to hold an optical fiber that is optically coupled to the first grating coupler, wherein the prism is configured to re-orient an optical path of an optical signal from the optical fiber.

A method comprising:

• patterning a silicon layer to form a waveguide;
• forming a plurality of photonic components in the waveguide;
• forming an interconnect structure over the waveguide and the plurality of photonic components;
• bonding a semiconductor device to the interconnect structure;
• forming a dielectric layer on the interconnect structure and surrounding the semiconductor device;
• bonding a first substrate to the dielectric layer and the semiconductor device;
• and
• coupling a prism to the first substrate.