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US 11,686,906 B1Granted
Self-aligned structure and method on interposer-based PIC
OwnerSuresh Venkatesaninventor
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Abstract
Alignment aid structures and the method of formation of these structures on an interposer comprised of a planar waveguide layer and a base structure, facilitate the alignment of the optical axes of optical and optoelectrical devices formed from and mounted to the interposer. Alignment aids formed from a common hard mask on the planar waveguide layer of the interposer structure include vertical and lateral alignment structures and fiducials. Optical losses for signals propagating in interposer-based photonic integrated circuits are reduced with effective alignment structures and methods.
Claims18
A substrate comprising
- a first optical component formed on the substrate,
- wherein the first optical component comprises a first optical axis,
- wherein the substrate is configured to accept a second optical component comprising a second optical axis;
- and
- an alignment aid element comprising a first topmost surface,
- wherein the first topmost surface is separated by a first distance with the first optical axis,
- wherein the second optical component comprising a second topmost surface,
- wherein the second topmost surface is separated by a second distance with the second optical axis,
- wherein the first distance is matched with the second distance in a way that enables an alignment of the first optical axis with the second optical axis when the second component is assembled on the first substrate with the first topmost surface contacting with the second topmost surface,
- a second alignment aid element comprising a third topmost surface parallel to the first topmost surface,
- wherein the third topmost surface is in a vicinity of the first optical axis,
- wherein the second alignment aid element comprises a fiducial pattern configured for aligning the second optical component with the substrate;
- a third alignment aid element comprising a fourth surface not parallel to the first surface,
- wherein the fourth surface is configured to be separated with a fifth surface of the second optical component by a distance less than an alignment tolerance between the first and second optical axes;
- and
- a fourth alignment aid element comprising an alignment constraint for laterally aligning an optical fiber,
- wherein the alignment constraint is configured to align an optical axis of the optical fiber with the first optical axis in a lateral direction.
14 more elements
A substrate comprising
- a first optical component,
- wherein the first optical component comprises a first optical axis,
- wherein the substrate is configured to accept a second optical component comprising a second optical axis;
- a first alignment aid element comprising a first surface parallel to a lateral surface of the substrate,
- wherein the first surface is a first topmost surface,
- wherein the first surface is separated by a first distance with the first optical axis,
- wherein the second optical component comprising a second surface,
- wherein the second surface is a second topmost surface,
- wherein the second surface is separated by a second distance with the second optical axis,
- wherein the first distance is matched with the second distance in a way that enables an alignment of the first optical axis with the second optical axis when the second component is assembled on the first substrate with the first topmost surface contacting with the second topmost surface;
- a second alignment aid element comprising a third surface parallel to the lateral surface,
- wherein the third surface is in a vicinity of the first optical axis in a direction perpendicular to the lateral plane,
- wherein the second alignment aid element comprises a fiducial pattern comprising the third surface,
- wherein the fiducial pattern is configured for laterally aligning the second optical component with the substrate;
- and
- a third alignment aid element comprising a fourth surface not parallel to the lateral surface,
- wherein the fourth surface is configured to be separated with a fifth surface of the second optical component by a distance less than an alignment tolerance between the first and second optical axes.
14 more elements
Dependencies are inferred from the claim text.