Back to results
US 11,686,693 B2Granted
Electron microscopy analysis method
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsNicolas Bernier, Loïc Henry
Life of this patent
Estimating the term…
Abstract
The present disclosure concerns an electron microscopy method, including the emission of a precessing electron beam and the acquisition, at least partly simultaneous, of an electron diffraction pattern and of intensity values of X rays.
Claims14
An electron microscopy method, comprising:
- emitting an electron beam having a precessional motion;
- and
- acquiring, at least partly simultaneously, an electron diffraction pattern and of intensity values of X rays.
Dependencies are inferred from the claim text.