High throughput 3D x-ray imaging system using a transmission x-ray source

A three-dimensional x-ray imaging system comprising:

• at least one position-sensitive x-ray detector;
• an x-ray source comprising an x-ray transmissive vacuum window having an outer surface, the x-ray source configured to produce diverging x-rays, at least some of the diverging x-rays emerging from the vacuum window and propagating along an x-ray propagation axis extending from the x-ray source, the diverging x-rays propagating through a region of interest of an object to the at least one position-sensitive x-ray detector, the diverging x-rays having an angular divergence angle greater than 1 degree centered on the x-ray propagation axis, the x-ray propagation axis at a first angle with respect to the outer surface of the vacuum window, the first angle in a range of 3 degrees to 45 degrees;
• and
• at least one sample motion stage configured to rotate the object about a rotation axis and configured to adjust the rotation axis to have a second angle relative to the x-ray propagation axis, the at least one sample motion stage having a non-systematic angular wobble less than 5 microradians.

A three-dimensional x-ray imaging system comprising:

• at least one position-sensitive x-ray detector;
• an x-ray source comprising an x-ray transmissive vacuum window having an outer surface, the x-ray source configured to produce diverging x-rays, at least some of the diverging x-rays emerging from the vacuum window and propagating along an x-ray propagation axis extending from the x-ray source, the diverging x-rays propagating through a region of interest of an object to the at least one position-sensitive x-ray detector, the diverging x-rays having an angular divergence angle greater than 1 degree centered on the x-ray propagation axis, the x-ray propagation axis at a first angle with respect to the outer surface of the vacuum window, the first angle in a range of 3 degrees to 45 degrees;
• and
• at least one sample motion stage configured to rotate the object about a rotation axis and configured to adjust the rotation axis to have a second angle relative to the x-ray propagation axis, the at least one sample motion stage having an aperture substantially transmissive to x-rays such that x-rays propagate through the aperture prior to impinging upon the region of interest within the object, the at least one sample motion stage configured to move the object in at least one direction substantially parallel to the outer surface of the vacuum window;
• and
• at least one motion mechanism to vary a geometric magnification of an image of the region of interest of the object generated by the at least one position-sensitive detector.