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AssigneeThe Boeing Company
InventorsSaman Farhangdoust, Gary E. Georgeson
Estimating the term…
A piezoelectric sensor includes a substrate, a meta-membrane adhered to the substrate, and a piezoelectric element adhered to the meta-membrane. The substrate includes a support frame which laterally surrounds and partly defines a recess and a cover film which overlies and partly defines the recess. The support frame supports the cover film along an entire periphery of the cover film. The meta-membrane is adhered to the cover film of the substrate. In accordance with one embodiment, the meta-membrane has an auxetic bi-axial kirigami honeycomb structure. In accordance with another embodiment, the meta-membrane has an auxetic hexagonal honeycomb structure. The meta-membrane is adhered to the substrate and to the piezoelectric element using elastic glue. In one proposed implementation, the substrate and meta-membrane are made of polycarbonate and the piezoelectric element comprises a piezoelectric substrate made of polyvinylidene fluoride.
A piezoelectric sensor comprising:
A pressure measuring system comprising a pressure sensor, a charge amplifier electrically coupled to the pressure sensor, and a measuring device electrically coupled to the charge amplifier, wherein the pressure sensor comprises:
A pressure measuring system comprising a pressure sensor, a charge amplifier electrically coupled to the pressure sensor, and a measuring device electrically coupled to the charge amplifier, wherein the pressure sensor comprises:
Dependencies are inferred from the claim text.