Displacement sensor and profile measurement apparatus
AssigneeMitutoyo Corporation
InventorAkihide Kimura
Life of this patent
Estimating the term…
Abstract
A displacement sensor includes a radiation part that irradiates a workpiece displaceable in a predetermined displacement direction with light, a light receiving part that receives a reflected light generated when the light radiated by the radiation part is reflected on the workpiece, and a fringe generation part that includes a generation means for generating fringes on a light receiving surface of the light receiving part when the light receiving part receives the reflected light from the workpiece. The fringe generation part and the light receiving part are arranged such that the fringe generation part and the light receiving part are parallel to the displacement direction, or parallel to a virtual image of the displacement direction.
Claims15
A displacement sensor comprising:
- a radiation emitter configured to irradiate a workpiece displaceable in a predetermined displacement direction with light;
- a light receiver configured to receive a reflected light generated when the light radiated by the radiation emitter is reflected on the workpiece;
- and
- a fringe generator configured to generate fringes on a light receiving surface of the light receiver when the light receiver receives the reflected light from the workpiece, wherein
- the displacement direction is a direction along an optical axis of the light that the radiation emitter is configured to irradiate the workpiece with, and
- the fringe generator and the light receiver are arranged such that the fringe generator and the light receiver are parallel to the displacement direction, or parallel to a virtual image of the displacement direction.
A non-contact optical probe comprising:
- a radiation emitter configured to irradiate a workpiece displaceable in a predetermined displacement direction with light;
- a light receiver configured to receive a reflected light generated when the light radiated by the radiation emitter is reflected on the workpiece;
- and
- a fringe generator configured to generate fringes on a light receiving surface of the light receiver when the light receiver receives the reflected light from the workpiece, wherein
- the displacement direction is a direction along an optical axis of the light that the radiation emitter is configured to irradiate the workpiece with, and
- the fringe generator and the light receiver are arranged such that the fringe generator and the light receiver are parallel to the displacement direction, or parallel to a virtual image of the displacement direction.
Dependencies are inferred from the claim text.