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US 11,686,300 B2Granted
Cryopump and regeneration method of cryopump
AssigneeSumitomo Heavy Industries, Ltd.
InventorKenji Mochidzuki
Life of this patent
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Abstract
A cryopump includes at least one cryopanel including a photocatalyst layer on a surface thereof, and an excitation light source that is disposed so as to irradiate the photocatalyst layer with excitation light that activates the photocatalyst layer.
Claims14
A cryopump comprising:
- a cryopump container defining a cryopump intake port;
- a high-temperature cryopanel accommodated in the cryopump container and cooled to a first cooling temperature;
- a low-temperature cryopanel surrounded with the high-temperature cryopanel and cooled to a second cooling temperature lower than the first cooling temperature;
- a photocatalyst layer on a surface of the high-temperature cryopanel or a surface of the low-temperature cryopanel, and
- an excitation light source arranged to emit excitation light into a space that is between and defined by the cryopump intake port and the low-temperature cryopanel, wherein the excitation light source irradiates the photocatalyst layer with the excitation light.
2 more elements
A cryopump comprising:
- a cryopump container defining a cryopump intake port;
- a high-temperature cryopanel accommodated in the cryopump container and cooled to a first cooling temperature;
- a low-temperature cryopanel surrounded with the high-temperature cryopanel and cooled to a second cooling temperature lower than the first cooling temperature;
- a photocatalyst layer on at least one of a surface of the high-temperature cryopanel and a surface of the low-temperature cryopanel;
- and
- a window on the cryopump container arranged to allow excitation light into a space between and defined by the cryopump intake port and the low-temperature cryopanel.
3 more elements
Dependencies are inferred from the claim text.