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US 11,686,009 B2Granted
Regulation plate, anode holder, and substrate holder
AssigneeEbara Corporation
InventorsNaoki Shimomura, Mizuki Nagai
Life of this patent
Estimating the term…
Abstract
To partially or locally control a plating film thickness on a polygonal substrate. There is provided a regulation plate for adjusting a current between an anode and the polygonal substrate. This regulation plate includes a main body that has an edge forming a polygonal opening through which the current passes and an attachable/detachable shielding member to shield at least a part of the polygonal opening.
Claims5
A substrate holder for holding a polygonal substrate, the substrate holder comprising:
- a holder main body that has an edge forming a polygonal opening to expose the held polygonal substrate;
- and
- an attachable/detachable shielding member to shield at least a part of the polygonal opening, wherein the shielding member includes a partition member configured to divide the polygonal opening into a plurality of compartments, the partition member is mounted across from one side of the edge of the polygonal opening to the other side edge to form a non-uniform film thickness.
Dependencies are inferred from the claim text.