Electroplating systems and methods with increased metal ion concentrations
AssigneeApplied Materials, Inc.
InventorsKwan Wook Roh, Charles Sharbono, Kyle M. Hanson
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AssigneeApplied Materials, Inc.
InventorsKwan Wook Roh, Charles Sharbono, Kyle M. Hanson
Estimating the term…
Electroplating methods and systems are described that include adding a metal-ion-containing starting solution to a catholyte to increase a metal ion concentration in the catholyte to a first metal ion concentration. The methods and systems further include measuring the metal ion concentration in the catholyte while the metal ions electroplate onto a substrate and the catholyte reaches a second metal ion concentration that is less than the first metal ion concentration. The methods and systems additionally include adding a portion of an anolyte directly to the catholyte when the catholyte reaches the second metal ion concentration. The addition of the portion of the anolyte increases the metal ion concentration in the catholyte to a third metal ion concentration that is greater than or about the first metal ion concentration.
An electroplating method comprising:
An electroplating method comprising:
Dependencies are inferred from the claim text.