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US 11,686,002 B2Granted
Method for manufacturing ruthenium wiring
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsYukihisa Wada, Shinya Koga, Kazuhiro Takahashi, Natsumi Okawa, Daijiro Mori
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Abstract
A method for manufacturing a ruthenium wiring including (i) treating a metal surface including ruthenium using a first chemical solution including a compound having a functional group capable of coordinating to a ruthenium atom, and (ii) carrying out an etching treatment on the metal surface including ruthenium treated with the first chemical solution, using a second chemical solution.
Claims7
A method for manufacturing a ruthenium wiring, the method comprising the following (i), (i)′ and (ii) in this order:
- (i) treating a metal surface including ruthenium using a first chemical solution comprising a compound having a functional group capable of coordinating to a ruthenium atom,
- (i)′ cleaning the metal surface including ruthenium using a cleaning solution;
- and
- (ii) carrying out an etching treatment on the metal surface including ruthenium treated with the first chemical solution, using a second chemical solution.
1 more element
Dependencies are inferred from the claim text.