Back to results
US 11,685,994 B2Granted
CVD device pumping liner
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsSheng-chun Yang, Yi-Ming Lin, Chih-tsung Lee, Yun-Tzu Chiu, Chao-Hung Wan
Life of this patent
Estimating the term…
Abstract
Pumping liners for use in an apparatus for depositing a material on a work piece by chemical vapor deposition includes a plurality of unevenly spaced apertures are disclosed. Uneven spacing of the plurality of apertures produces a uniform flow of processing gases within a processing chamber with which the pumping liner is associated. Films of materials deposited onto a work piece by chemical vapor deposition techniques using disclosed pumping liners exhibit desirable properties such as uniform thickness and smooth and uniform surfaces.
Claims20
An apparatus for depositing a material on a work piece by chemical vapor deposition, the apparatus comprising:
- a processing chamber, the processing chamber including a pedestal assembly, which in operation, supports a work piece;
- and
- a pumping liner defining a circumferential body having a plurality of apertures including a first aperture, a second aperture and a third aperture, disposed around the circumferential body, through which gas within the processing chamber is exhausted from the processing chamber, each of the plurality of apertures consisting a first portion having a cylindrical shape and a circular cross section of a same diameter and a second portion having a frustoconical shape and a circular cross-section, the frustoconical shape of the second portion including a smaller diameter first end and a larger diameter second end, the first portion extending from the smaller diameter first end of the frustoconical shape of the second portion, the circumferential body including an inner circumferential surface, an outer circumferential surface, an upper surface and a lower surface, wherein each of the plurality of apertures are tilted relative to the upper surface, are tilted relative to the lower surface and extend through the body from the inner circumferential surface to the outer circumferential surface, the second aperture being intermediate the first aperture and the third aperture and directly adjacent to the first aperture and the third aperture, the first aperture and the second aperture defining a first aperture pair, a first distance between a centerline of the first aperture and a centerline of the second aperture of the first aperture pair measured along the outer circumferential surface separating the first aperture and the second aperture of the first aperture pair, the second aperture and the third aperture defining a second aperture pair, a second distance between a centerline of the second aperture and a centerline of the third aperture of the second aperture pair measured along the outer circumferential surface separating the second aperture and the third aperture of the second aperture pair;
- and
- an exhaust port through which the gas which has passed through the first aperture, the second aperture and the third aperture of the pumping liner is exhausted from the processing chamber, wherein the first aperture pair is closer to the exhaust port than the second aperture pair and the first distance for the first aperture pair is less than the second distance for the second aperture pair.
2 more elements
A pumping liner for use in a method of depositing a material on a work piece by chemical vapor deposition, the pumping liner comprising:
- a circumferential body having a plurality of apertures disposed entirely around the circumferential body;
- an inner circumferential surface;
- an outer circumferential surface;
- an upper surface;
- a lower surface;
- the plurality of apertures including a first aperture, a second aperture and a third aperture, the first aperture directly adjacent the second aperture and the third aperture directly adjacent the second aperture, each of the first aperture, the second aperture and the third aperture consists of a first portion having a cylindrical shape and a circular cross section and a second portion having a frustoconical shape and a circular cross-section, the frustoconical shape of the second portion including a smaller diameter first end and a larger diameter second end, the first portion extending from the smaller diameter first end of the frustoconical shape of the second portion, each of the first aperture, the second aperture and the third aperture tilted relative to the upper surface, each of the first aperture, the second aperture and the third aperture tilted relative to the lower surface and each of the first aperture, the second aperture and the third aperture extending through the body from the inner circumferential surface to the outer circumferential surface, the second aperture being intermediate the first aperture and the third aperture and directly adjacent to the first aperture and the third aperture, the first aperture and the second aperture defining a first aperture pair, a first distance between a centerline of the first aperture and a centerline of the second aperture of the first aperture pair measured along the outer circumferential surface separating the first aperture and the second aperture of the first aperture pair, the second aperture and the third aperture comprising a second aperture pair, a second distance between a centerline of the second aperture and a centerline of the third aperture of the second aperture pair measured along the outer circumferential surface separating the second aperture and the third aperture of the second aperture pair;
- and
- an exhaust port through which gas which has passed through the first aperture, the second aperture and the third aperture of the pumping liner is exhausted, wherein the first aperture pair is closer to the exhaust port than the second aperture pair and the first distance for the first aperture pair is less than the second distance for the second aperture pair.
5 more elements
A system for depositing a material on a work piece by chemical vapor deposition, the system comprising:
- a processing chamber, the processing chamber including a pedestal assembly, which in operation, supports a work piece;
- a pumping liner within the processing chamber and defining a circumferential body having a plurality of apertures disposed entirely around the circumferential body, the pumping liner further including:
- an upper surface;
- a lower surface;
- an inner circumferential surface;
- an outer circumferential surface, wherein
- the plurality of apertures including a first aperture directly adjacent a second aperture and a third aperture directly adjacent the second aperture, each of the first aperture, the second aperture and the third aperture consisting a first portion having a cylindrical shape and a circular cross section and a second portion having a frustoconical shape and a circular cross section, the frustoconical shape of the second portion including a smaller diameter first end and a larger diameter second end, the first portion extending from the smaller diameter first end of the frustoconical shape of the second portion, each of the first aperture, the second aperture and the third aperture extending through the body from the inner circumferential surface to the outer circumferential surface, the second aperture being intermediate the first aperture and the third aperture, the first aperture and the second aperture defining a first aperture pair, a first distance between a centerline of the first aperture and a centerline of the second aperture of the first aperture pair measured along the outer circumferential surface separating the first aperture and the second aperture of the first aperture pair, the second aperture and the third aperture comprising a second aperture pair, a second distance between a centerline of the second aperture and a centerline of the third aperture of the second aperture pair measured along the outer circumferential surface separating the second aperture and the third aperture of the second aperture pair;
- and
- an exhaust port through which gas which has passed through the first aperture, the second aperture and the third aperture of the pumping liner is exhausted from the processing chamber, wherein the first aperture pair is closer to the exhaust port than the second aperture pair and the first distance for the first aperture pair is less than the second distance for the second aperture pair.
6 more elements
Dependencies are inferred from the claim text.