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US 11,685,985 B2Granted
Method of manufacturing metal mask
AssigneeDarwin Precisions Corporation
InventorsYun-Heng Chen, Wen-Yi Lin
Life of this patent
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Abstract
A method of manufacturing a metal mask includes calendering a metal material, so as to form a metal mask substrate, where the metal mask substrate includes a surface and a plurality of grooves formed in the surface, and the grooves all extend in a direction. The surface has at least one sampling region, while at least two grooves are distributed in the sampling region, where an average area ratio of the area of the grooves within the sampling region to the area of the sampling region ranges between 45% and 68%.
Claims5
A method of manufacturing a metal mask, comprising:
- calendering a metal material, so as to form a metal mask substrate, wherein the metal mask substrate comprises a surface and a plurality of grooves formed in the surface, and the grooves all extend in a direction, wherein the surface has at least one sampling region, and at least two grooves are distributed in the at least one sampling region, wherein an average area ratio of an area of the grooves within the sampling region to an area of the sampling region ranges between 45% and 68%;
- and
- performing a photolithography to the metal mask substrate.
Dependencies are inferred from the claim text.