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US 11,685,752 B2Granted
Process for preparing organotin compounds
AssigneeEntegris, Inc.
InventorsDavid M. Ermert, Thomas H. Baum, Thomas M. Cameron
Life of this patent
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Abstract
Provided is a facile methodology for preparing certain organotin compounds having alkyl and alkylamino or alkyl and alkoxy substituents. The process provides the organotin compounds in a highly pure form which are particularly useful as precursors in the deposition of high-purity tin oxide films in, for example, extreme ultraviolet light (EUV) lithography techniques used in the manufacture of certain microelectronic devices.
Claims13
A process for preparing a compound of the Formula (I):
- wherein each R is independently chosen from C1-C5 alkyl groups, each R1 is independently chosen from C1-C5 alkyl groups, and R2 is chosen from a vinyl group or an acetylenyl group, wherein the process comprises:
- contacting a compound of the Formula (A)
- with a compound of the Formula L-R2, wherein L is leaving group, and M is chosen from sodium, lithium, or potassium.
A process for preparing a compound of Formula (I):
- wherein each R is independently chosen from C1-C5 alkyl groups, each R1 is independently chosen from C1-C5 alkyl groups, and R2 is chosen from hydrogen or C1-C5 alkyl groups, wherein the process comprises:
- contacting a compound of Formula (II):
- wherein each R3 is independently chosen from straight or branched chain C1-C8 alkyl groups, a phenyl group, and substituted phenyl groups,
- with a compound of Formula (R4)3Si—N(R)(R1), wherein R4 is chosen from C1-C3 alkyl groups.
1 more element
A compound of Formula (II):
- wherein each R3 is independently chosen from straight or branched chain C1-C8 alkyl groups, a phenyl group, and substituted phenyl groups, and R2 is chosen from hydrogen or C1-C5 alkyl groups wherein R3 is 2,6-di-t-butylphen-1-yl or 2,4,6-trimethylphenyl.
Dependencies are inferred from the claim text.