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US 11,685,644 B2Granted
Microelectromechanical device with stopper
AssigneeMurata Manufacturing Co., Ltd.
InventorsMarko Peussa, Pasi Kivinen
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Abstract
This disclosure describes a microelectromechanical device comprising at least one mobile rotor. The rotor comprises a rotor measurement region and a rotor stopper region and a rotor isolation region which connects the rotor measurement region mechanically to the rotor stopper region and isolates the rotor measurement region electrically from the rotor stopper region.
Claims2
A microelectromechanical device, comprising:
- a device wafer that defines a horizontal device plane;
- a mobile rotor in the horizontal device plane and which comprises a first rotor measurement region made of silicon and a rotor stopper region made of silicon;
- a fixed stator which is adjacent to the rotor and comprises a first stator measurement region and a stator stopper region;
- wherein the mobile rotor is configured to undergo translational motion toward the fixed stator;
- wherein the rotor stopper region is separated from the stator stopper region by a stopper gap, and wherein the mobile rotor also comprises a vertical first rotor isolation region in a vertical direction,
- wherein the vertical direction is perpendicular to the device plane, and the first rotor isolation region is made of an insulating material which connects the first rotor measurement region mechanically to the rotor stopper region and isolates the first rotor measurement region electrically from the rotor stopper region, and
- wherein the rotor stopper region and the stator stopper region are set to the same potential.
4 more elements
Dependencies are inferred from the claim text.