Tactile and/or optical distance sensor, system having such a distance sensor, and method for calibrating such a distance sensor or such a system

Abstract

A tactile and/or optical distance sensor includes a housing, which has at least one elongate portion, a measurement arm, which is arranged in the housing, at least partially extends through the elongate portion and has a tactile and/or an optical probe element at one end, a transducer, which is configured to capture a position of the tactile probe element or a signal of the optical probe element and to generate associated probe element measurement signals, and an advance unit, with which the housing is linearly dis-placeable along an advance direction. A strain sensor is located in the region of the measurement arm extending through the elongate portion or at an adjacent region directly adjoining said region. In addition, a system for measuring the roughness of a surface of a workpiece and a method for calibrating a distance sensor or a system are provided.

Dependencies are inferred from the claim text.