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US 11,684,988 B2Granted
Prevention of dripping of material for material injection
AssigneeInternational Business Machines Corporation
InventorsToyohiro Aoki, Eiji Nakamura, Takashi Hisada
Life of this patent
Estimating the term…
Abstract
An injection apparatus for injection material is disclosed. The injection apparatus includes a tank for storing material. The injection apparatus further includes a head body that has a surface for contacting a substrate and an opening part opened at the surface for discharging the material in fluid-communication with the tank. The injection apparatus further includes a member connected to the opening part, in which the member allows gas to flow into and flow out from the opening part.
Claims20
A method for injecting material, comprising:
- placing an injection apparatus onto a substrate, the injection apparatus comprising a first tank for storing a material, the first tank including a first valve;
- a second tank in fluid communication with the first tank, the second tank including a second valve;
- and a head body having a surface in contact with the substrate and an opening part opened at the surface;
- discharging the material from the opening part;
- and
- transferring the material filled in the opening part to the first tank of the injection apparatus while taking gas into the opening part through at least one member.
3 more elements
A method for injecting material, comprising:
- placing an injection apparatus onto a substrate, the injection apparatus comprising at least one tank for storing a material;
- and a head body having a surface in contact with the substrate and an opening part opened at the surface and covered by the substrate;
- discharging the material from the opening part;
- and
- transferring the material filled in the opening part to the at least one tank of the injection apparatus while taking gas into the opening part through at least one member.
2 more elements
Dependencies are inferred from the claim text.