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US 11,684,955 B2Granted
Chemical supply unit, substrate processing apparatus, and substrate processing method
AssigneeSemes Co., Ltd.
InventorsTae Suk Yun, Hyeon Suk Park
Life of this patent
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Abstract
An apparatus for processing a substrate includes a housing having a processing space in which the substrate is processed, a support unit that supports the substrate in the processing space, a nozzle that dispenses a chemical onto the substrate placed on the support unit, a chemical supply unit that supplies the chemical to the nozzle, and a controller that controls the chemical supply unit.
Claims10
An apparatus for processing a substrate, the apparatus comprising:
- a housing having a processing space in which the substrate is processed;
- a support unit configured to support the substrate in the processing space;
- a nozzle configured to dispense a chemical onto the substrate placed on the support unit;
- a chemical supply unit configured to supply the chemical to the nozzle;
- and
- a controller configured to control the chemical supply unit,
- wherein the chemical supply unit includes:
- a tank having an interior space in which the chemical is stored;
- a sensor configured to detect a remaining amount of the chemical stored in the interior space of the tank;
- an inlet line through which the chemical is supplied from a chemical supply source to the interior space of the tank and in which an inlet valve is installed;
- an outlet line through which the chemical is supplied from the interior space of the tank to the nozzle and in which an outlet valve is installed;
- and
- a drain line through which the chemical in the interior space of the tank is drained and in which a drain valve is installed,
- wherein the controller controls the chemical supply unit to supply a new chemical from the chemical supply source to the tank in a state in which the chemical remains in the interior space of the tank, when the remaining amount detected by the sensor reaches a first preset amount or less,
- wherein the tank includes a first tank and a second tank, and
- wherein the chemical supply unit further includes a circulation line configured to circulate the chemical stored in one of the first tank and the second tank when an other one of the first tank and the second tank receives the chemical from the chemical supply source through the inlet line, supplies the chemical to the nozzle through the outlet line, or drains the chemical through the drain line.
13 more elements
A chemical supply unit for supplying a chemical, the chemical supply unit comprising:
- a tank having an interior space in which the chemical is stored;
- a sensor configured to detect a remaining amount of the chemical stored in the interior space of the tank;
- an inlet line through which the chemical is supplied from a chemical supply source to the interior space of the tank and in which an inlet valve is installed;
- an outlet line through which the chemical is supplied from the interior space of the tank to an object to be processed and in which an outlet valve is installed;
- a drain line through which the chemical in the interior space of the tank is drained and in which a drain valve is installed;
- and
- a controller configured to control the chemical supply unit,
- wherein the controller controls the chemical supply unit to supply a new chemical from the chemical supply source to the tank in a state in which the chemical remains in the interior space of the tank, when the remaining amount detected by the sensor reaches a first preset amount or less,
- wherein the tank includes a first tank and a second tank, and
- wherein the chemical supply unit further comprises a circulation line configured to circulate the chemical stored in one of the first tank and the second tank when an other one of the first tank and the second tank receives the chemical from the chemical supply source through the inlet line, supplies the chemical through the outlet line to the object to be processed, or drains the chemical through the drain line.
7 more elements
Dependencies are inferred from the claim text.