Micromachined ultrasonic transducer devices having truncated circle shaped cavities

An ultrasonic transducer device, comprising:

• a substrate having a membrane support layer formed on a bottom cavity layer;
• an opening in the membrane support layer so as to form a transducer cavity, wherein the opening comprises a squircle shape;
• and
• a plurality of openings in the membrane support layer so as to form a plurality of transducer cavities;
• wherein:
• the transducer cavity is a first transducer cavity, the squircle shape of the first transducer cavity comprises a first linear side corresponding to a location adjacent a second linear side of a squircle shape of a second transducer cavity of the plurality of transducer cavities, and the second transducer cavity is a nearest neighbor of the first transducer cavity;
• and
• the first linear side of the first transducer cavity and the second linear side of the second transducer cavity are shaped so as to double a nearest neighbor distance between the first transducer cavity and the second transducer cavity compared to the nearest neighbor distance if the openings of the first and second transducer cavities comprised circle shapes centered at same locations as the squircle shapes of the first and second transducer cavities and having a same radius of curvature as curved portions of the squircle shapes of the first and second transducer cavities.