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US 11,684,941 B2Granted
Showerhead with embedded nut
AssigneeApplied Materials, Inc.
InventorKenneth Brian Doering
Life of this patent
Estimating the term…
Abstract
A showerhead with an embedded nut is disclosed. The showerhead comprises an embedded nut within a cavity. The nut may be engaged by a bolt through an opening in the cavity to support the showerhead. The apparatus allows for the support of the showerhead without the potential for metal contamination.
Claims16
A showerhead comprising:
- a body having an inner region and an outer region, the inner region having a back surface and a front surface defining a thickness of the inner region, the outer region having a back surface and a front surface defining a thickness of the outer region, the body bounded by an outer peripheral edge;
- a plurality of cavities within the outer region of the body, each of the cavities having a back surface with an opening extending to the back surface of the outer region, and a cover plate fused with the body, the cover plate having a back surface within the cavity and a front surface coplanar with the front surface of the outer region of the body;
- and
- a nut positioned within and free to float within each of the cavities and configured to receive a bolt through the opening in the back surface of each cavity.
1 more element
A gas distribution assembly comprising:
- a showerhead comprising:
- a body having an inner region and an outer region, the inner region having a back surface and a front surface defining a thickness of the inner region, the outer region having a back surface and a front surface defining a thickness of the outer region, the body bounded by an outer peripheral edge;
- a plurality of cavities within the outer region of the body, each of the cavities having a back surface with an opening extending to the back surface of the outer region, and a cover plate fused with the body, the cover plate having a back surface within the cavity and a front surface substantially coplanar with the front surface of the outer region of the body;
- and
- a nut positioned within and free to float within each of the cavities and configured to receive a bolt through the opening in the back surface of the cavity;
- a gas distribution funnel positioned above the inner region of the showerhead, the gas distribution funnel shaped so as to form a funnel-shaped space above the inner region;
- and
- a base ring overlapping the outer region of the showerhead, the base ring comprising a plurality of holes through the base ring, each hole aligned to an opening in the cavities, each hole containing the bolt configured to attach to the nut through the opening.
5 more elements
Dependencies are inferred from the claim text.