Electrical tracking of a multiphase microfluidic flow

A system for tracking multiphase flow in microfluidic device, the system comprising:

• a processor;
• a memory coupled to the processor, the processor configured to:
• receive first readings from a multi-terminal first sensor and a multi-terminal second sensor of the microfluidic device, the first readings representing a detection of a fluid at an interface between the fluid and a first terminal of the multi-terminal first sensor, the first readings further representing a detection of the fluid at an interface between the fluid and a first terminal of the multi-terminal second sensor;
• receive second readings from the multi-terminal first sensor and a multi-terminal second sensor of the microfluidic device, the second readings representing a detection of the fluid at an interface between the fluid and a second terminal of the multi-terminal first sensor, the second readings further representing a detection of the fluid at an interface between the fluid and a second terminal of the multi-terminal second sensor;
• and
• calculate a flow speed of the fluid in the microfluidic device based at least in part on a difference of time between the detection by the multi-terminal first sensor and the multi-terminal second sensor, and the distance between the multi-terminal first sensor and the multi-terminal second sensor.

A method of fabricating a semiconductor device, the method comprising:

• forming a first wafer comprising a first terminal of a multi-terminal first sensor and a second terminal of the multi-terminal first sensor;
• forming a second wafer comprising a first terminal of a multi-terminal second sensor and a second terminal of the multi-terminal second sensor;
• and
• bonding the first wafer to the second wafer, wherein the first terminal in the first wafer is opposite the first terminal in the second wafer, and wherein the second terminal in the first wafer is opposite the second terminal of the second wafer.