Hybrid material post-CMP brushes and methods for forming the same
AssigneeIllinois Tool Works Inc.
InventorsBradley Scott Withers, Yuyan Luo, Erik Scott Nelson, Brent Allan Best
Life of this patent
Estimating the term…
Abstract
Provided is disclosure for hybrid material post-CMP brushes and methods for forming the same. Embodiments of a hybrid material post-CMP brush may comprise at least two layers, where the hybrid brush is used to clean various surfaces, such as surfaces of semiconductor substrates. An example hybrid brush for cleaning a surface includes a mandrel, a molded first layer formed about the mandrel, where the molded first layer comprises a first material, and a molded second layer surrounding the molded first layer, where the molded second layer comprises a second material.
Claims20
A hybrid brush for cleaning a surface, comprising:
- a mandrel, wherein the mandrel defines a central opening configured to receive an axle;
- a non-molded first layer placed around the mandrel, wherein the first layer comprises a first material;
- and
- a molded second layer molded about the non-molded first layer, wherein the molded second layer comprises a second material.
A method for forming a hybrid brush for cleaning a surface, comprising:
- placing a non-molded first layer comprising a first material around a mandrel, wherein the mandrel defines a central opening configured to receive an axle;
- placing the mandrel with the non-molded first layer into a mold;
- and
- forming a second layer surrounding the non-molded first layer by injecting a second material into the mold.
Dependencies are inferred from the claim text.