High frequency magnetic films, method of manufacture, and uses thereof

Abstract

A multilayer film includes a substrate; a first magnetic layer disposed on the substrate and a second magnetic layer disposed on the first magnetic layer. The first magnetic layer includes Fe(50-80)N(10-20)B(1-20)M(0-10), wherein M is Si, Ta, Zr, Ti, Co, or a combination thereof. The second magnetic layer includes Fe(50-90)N(10-50) or Fe(60-90)N(1-10)Ta(5-30). The multilayer magnetic film has, over a frequency range of 50 MHz to 10 GHz, a magnetic permeability of greater than or equal to 1800 over a selected frequency band in the frequency range; a magnetic loss tangent of less than or equal to 0.3 over a selected frequency band in the frequency range; and a cutoff frequency of greater than or equal to 1 GHz, or greater than or equal to 2 GHz.

Dependencies are inferred from the claim text.