Semiconductor burn-in oven chamber sealing

A semiconductor burn-in oven comprising:

• a housing including a burn-in chamber and an opening to the burn-in chamber surrounded by a front face;
• a heating device configured to heat the burn-in chamber;
• testing circuitry configured to power semiconductor devices received within the burn-in chamber;
• a door having open position, in which the burn-in chamber is accessible through the opening, and a closed position, in which the door covers the opening;
• a motorized carriage configured to drive the door along an axis that extends along the front face of the housing between the open and closed positions;
• and
• a sealing mechanism configured to form a seal around the opening between an interior side of the door and the front face of the housing when the door is in the closed position, the sealing mechanism comprising:
• at least one sealing member each having a recessed position, in which a gap extends between the front face of the housing and the interior side of the door, and a sealing position, in which the at least one sealing member closes the gap and forms the seal;
• and
• a supply of compressed air,
• wherein:
• the sealing mechanism is configured to direct a flow of compressed air from the compressed air supply into an interior chamber of each sealing member to inflate each sealing member and transition each sealing member from the recessed position to the sealing position;
• and
• the sealing mechanism is configured to direct a flow of air out of the interior chamber of each sealing member to transition each sealing member from the sealing position to the recessed position.

A method of operating a semiconductor burn-in oven, wherein the semiconductor burn-in oven comprises:

• a housing defining a burn-in chamber and including an opening to the burn-in chamber surrounded by a front face of the housing;
• a heating device configured to heat the burn-in chamber;
• testing circuitry configured to power semiconductor devices received within the burn-in chamber;
• a door having an open position, in which the burn-in chamber is accessible through the opening, and a closed position, in which the door covers the opening;
• and
• a sealing mechanism comprising at least one sealing member,
• wherein the method comprises:
• moving the door from the open position to the closed position;
• transitioning each sealing member from a recessed position, in which a gap extends between the front face of the housing and an interior side of the door, to a sealing position, in which each sealing member closes the gap and forms a seal between the front face of the housing and the interior side of the door.