Physical quantity sensor
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsTakanori Aoyagi, Hiroyuki Aizawa, Chunzhi Dong, Shinichi Kishimoto
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AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsTakanori Aoyagi, Hiroyuki Aizawa, Chunzhi Dong, Shinichi Kishimoto
Estimating the term…
A physical quantity sensor includes a substrate, an anchor portion, a surrounding portion, a detecting element, a moving portion, and a beam portion. The anchor portion is formed on the same side as a principal surface of the substrate and fixed to the substrate. The surrounding portion is formed on the same side as the principal surface of the substrate and surrounds the anchor portion. The detecting element detects a physical quantity as a target of detection. The moving portion is provided with at least a part of the detecting element, formed on the same side as the principal surface of the substrate, and connected to the surrounding portion. The beam portion is formed on the same side as the principal surface of the substrate and connects the anchor portion and the surrounding portion together.
A physical quantity sensor comprising:
A physical quantity sensor comprising:
Dependencies are inferred from the claim text.