Vapor delivery device, methods of manufacture and methods of use thereof

A delivery system for a liquid precursor compound comprising:

• a first regulator;
• a second regulator, wherein the first regulator is disposed upstream of the second regulator;
• a proportional valve disposed downstream of the first regulator and being in fluid communication with the first regulator;
• a delivery device disposed downstream of a first shutoff valve and having an inlet valve and an outlet valve;
• a physical-chemical sensor disposed downstream of the delivery device and being operative to analyze chemical contents of a fluid stream emanating from the delivery device, the physical-chemical sensor being in communication with the proportional valve;
• a first controller being in operative communication with the proportional valve and the physical-chemical sensor;
• at least one reactor being in fluid communication with at least one mass flow controller to extract the precursor vapor from the delivery device;
• and
• wherein the delivery system is operative to deliver a substantially constant number of moles of a liquid precursor compound vapor per unit volume of a carrier gas to a reactor that is in communication with the delivery system, wherein the liquid precursor compound is in a liquid state in the delivery device, wherein the proportional valve is in electrical communication with the first controller, and wherein the proportional valve is operative to control the flow of the carrier gas based on an applied voltage.