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US 11,680,040 B2Granted
Compound, photoresist composition comprising same, photoresist pattern comprising same, and method for manufacturing photoresist pattern
AssigneeLG Chem, Ltd.
InventorsHyunmin Park, Minyoung Lim
Life of this patent
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Abstract
The present specification provides a compound, a photoresist composition comprising the same, a photoresist pattern comprising the same, and a method for preparing a photoresist pattern.
Claims14
A compound represented by Chemical Formula 1:
- wherein, in the Chemical Formula 1,
- p is an integer of 2 to 4;
- X is S, a substituted or unsubstituted aryl group, a substituted or unsubstituted heteroaryl group or a substituted or unsubstituted alkyl group, provided that
- when p is an integer of 3 or 4, X is not S;
- L1 is the same as or different from each other and each independently is a direct bond, a substituted or unsubstituted alkylene group, a substituted or unsubstituted arylene group, or a substituted or unsubstituted heteroarylene group;
- Rb is the same as or different from each other and each independently is a substituted or unsubstituted alkyl group, a substituted or unsubstituted cycloalkyl group, a substituted or unsubstituted aryl group, or a substituted or unsubstituted heteroaryl group;
- Q+ is the same as or different from each other and each independently is an onium cation;
- Y− is the same as or different from each other and each independently is an acid anion;
- and
- m and n are each an integer of 1 to 10.
7 more elements
Dependencies are inferred from the claim text.