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US 11,677,380 B2Granted
Suppression of transverse mode spurious signals in surface acoustic wave devices utilizing a gap hammer structure
AssigneeSkyworks Solutions, Inc.
InventorsJoji Fujiwara, Riho Sasaki
Life of this patent
Estimating the term…
Abstract
An acoustic wave device comprises a substrate including a piezoelectric material, and interdigital transducer (IDT) electrodes disposed on a surface of the substrate. The IDT electrodes have gap regions, edge regions, and center regions. A maximum width of the IDT electrodes in the gap regions is greater than the maximum width of the IDT electrodes in the edge regions, thereby achieving a velocity of an acoustic wave in the gap regions being greater than the velocity of the acoustic wave in the center regions, and the velocity of the acoustic wave in the center regions being greater than the velocity of the acoustic wave in the edge regions.
Claims18
An acoustic wave device comprising:
- a substrate including a piezoelectric material;
- interdigital transducer (IDT) electrodes disposed on a surface of the substrate, the IDT electrodes including a first bus bar, a second bus bar opposite the first bus bar, and electrode fingers including a first plurality of electrode fingers extending from the first bus bar and a second plurality of electrode fingers extending from the second bus bar and interleaved with the first plurality of electrode fingers, the IDT electrodes having gap regions, edge regions, center regions, and extending regions defined in the gap regions from tips of each electrode finger to an opposing bus bar, edges of the extending regions aligned with edges of the corresponding electrode fingers from which they extend, a maximum width of the IDT electrodes in the gap regions being greater than the maximum width of the IDT electrodes in the edge regions to cause a velocity of an acoustic wave in the gap regions to be greater than the velocity of the acoustic wave in the center regions, and the velocity of the acoustic wave in the center regions to be greater than the velocity of the acoustic wave in the edge regions;
- and
- IDT electrode extensions extending from the IDT electrode fingers in a widthwise direction from the IDT electrode fingers in the gap regions, the IDT electrode extensions of the first plurality of electrode fingers extending at least partially into the extending regions of the second plurality of electrode fingers, gaps being defined between the IDT electrode extensions of each of the first plurality of electrode fingers and each other of the first plurality of electrode fingers.
1 more element
A radio frequency filter including at least one acoustic wave device, the at least one acoustic wave device comprising:
- a substrate including a piezoelectric material;
- interdigital transducer (IDT) electrodes disposed on a surface of the substrate, the IDT electrodes including a first bus bar, a second bus bar opposite the first bus bar, and electrode fingers including a first plurality of electrode fingers extending from the first bus bar and a second plurality of electrode fingers extending from the second bus bar and interleaved with the first plurality of electrode fingers, the IDT electrodes having gap regions, edge regions, center regions, and extending regions defined in the gap regions from tips of each electrode finger to an opposing bus bar, edges of the extending regions aligned with edges of the corresponding electrode fingers from which they extend, a velocity of an acoustic wave in the gap regions being greater than the velocity of the acoustic wave in the center regions, the velocity of the acoustic wave in the center regions being greater than the velocity of the acoustic wave in the edge regions;
- and
- IDT electrode extensions extending from the IDT electrode fingers in a widthwise direction from the IDT electrode fingers in the gap regions, the IDT electrode extensions of the first plurality of electrode fingers extending at least partially into the extending regions of the second plurality of electrode fingers, gaps being defined between the IDT electrode extensions of each of the first plurality of electrode fingers and each other of the first plurality of electrode fingers.
1 more element
An electronics module including at least one radio frequency filter including at least one acoustic wave device, the at least one acoustic wave device comprising:
- a substrate including a piezoelectric material;
- interdigital transducer (IDT) electrodes disposed on a surface of the substrate, the IDT electrodes including a first bus bar, a second bus bar opposite the first bus bar, and electrode fingers including a first plurality of electrode fingers extending from the first bus bar and a second plurality of electrode fingers extending from the second bus bar and interleaved with the first plurality of electrode fingers, the IDT electrodes having gap regions, edge regions, center regions, and extending regions defined in the gap regions from tips of each electrode finger to an opposing bus bar, edges of the extending regions aligned with edges of the corresponding electrode fingers from which they extend, a velocity of an acoustic wave in the gap regions being greater than the velocity of the acoustic wave in the center regions, the velocity of the acoustic wave in the center regions being greater than the velocity of the acoustic wave in the edge regions;
- and
- IDT electrode extensions extending from the IDT electrode fingers in a widthwise direction from the IDT electrode fingers in the gap regions, the IDT electrode extensions of the first plurality of electrode fingers extending at least partially into the extending regions of the second plurality of electrode fingers, gaps being defined between the IDT electrode extensions of each of the first plurality of electrode fingers and each other of the first plurality of electrode fingers.
1 more element
Dependencies are inferred from the claim text.