Out-of-plane hinge for micro and nanoelectromechanical systems with reduced non-linearity
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsSamer Dagher, Loic Joet
Life of this patent
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Abstract
A hinge for a microelectromechanical system includes a fixed part and a part movable relative to the fixed part along at least an out-of-plane direction, the hinge being intended to suspend the moving part from the fixed part. The hinge includes a first rigid part, a second part fixed to the first part at one end and intended to be anchored to the fixed part or the moving part. The second part deforms in bending in a first direction, two third parts are fixed to the first part and are anchored to the moving part or the fixed part, and the third parts deform in bending along a second direction orthogonal to the first direction.
Claims18
A hinge between a first element and a second element of a microelectromechanical system, the first element and the second element movable relative to each other at least in an out-of-plane direction, said hinge comprising:
- a first rigid part,
- a second part fixed to the first rigid part at one end and configured to be anchored on the first element, said second part being configured to deform in bending in a first direction, and
- two third parts fixed to the first rigid part and configured to be anchored to the second element, the two third parts being configured to deform in bending along a second direction orthogonal to the first direction.
Dependencies are inferred from the claim text.