Method for manufacturing large ceramic co-fired articles

A method of forming one or more high temperature co-fired ceramic electrostatic chucks having an orthogonal dimension Z less than the X and Y dimensions, comprising:

• a) forming one or more green compacts comprising an inorganic component of titania, ZrO2, Y2O3, AlN, Si3N4, SiC, or combinations thereof, by a process comprising dry pressing a powder comprising ceramic and organic binder to form each of the one or more green compacts;
• b) disposing a conductor or conductor precursor to at least one surface layer of at least one of the one or more green compacts to form at least one electrode chuck patterned green compact;
• c) assembling an insulating green tape cast layer, which functions as a dielectric layer, to the electrostatic chuck electrode patterned green compact to form a laminated assembly;
• d) isostatically pressing the laminated assembly to form a pressed laminated assembly;
• e) firing the pressed laminated assembly at a temperature sufficient to sinter the ceramic of the one or more green compacts and the insulating green tape cast layer together and to mould around the deposited conductor or conductor precursor to form a monolithic ceramic body with one or more electrically conductive electrodes embedded therein, said tape cast layer being less than half the thickness of an adjacent dry pressed green compact, such that the dry pressed green compact suppresses a lack of uniformity of skrinkage of the dielectric layer;
• wherein step (e) further comprises:
• i. supporting the pressed laminated assembly on an insulating setter having at least one substantially flat surface;
• ii. mounting an insulating weight having at least one substantially flat surface on the pressed laminated assembly such that the pressed laminated assembly lies between the substantially flat surface of the insulating setter and the insulating weight.

A method of forming one or more high temperature co-fired ceramic electrostatic chucks having an orthogonal dimension Z less than the X and Y dimensions, comprising:

• a) forming one or more green compacts comprising an inorganic component of alumina, titania, ZrO2, Y2O3, AlN, Si3N4, SiC, or combinations thereof, by a process comprising dry pressing a powder comprising ceramic and organic binder to form each of the one or more green compacts;
• b) disposing a conductor or conductor precursor to at least one surface layer of at least one of the one or more green compacts to form at least one electrode chuck patterned green compact;
• c) assembling an insulating green tape cast layer, which functions as a dielectric layer, to the electrostatic chuck electrode patterned green compact to form a laminated assembly;
• d) isostatically pressing the laminated assembly to form a pressed laminated assembly;
• e) firing the pressed laminated assembly at a temperature sufficient to sinter the ceramic of the one or more green compacts and the insulating green tape cast layer together and to mould around the deposited conductor or conductor precursor to form a monolithic ceramic body with one or more electrically conductive electrodes embedded therein, wherein step (e) further comprises:
• i. supporting the pressed laminated assembly on an insulating setter having at least one substantially flat surface;
• ii. mounting an insulating weight having at least one substantially flat surface on the pressed laminated assembly such that the pressed laminated assembly lies between the substantially flat surface of the insulating setter and the insulating weight.