Method for machining synthetic quartz glass substrate
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsMasao Ando, Hiroyuki Yamazaki
Life of this patent
Estimating the term…
Abstract
A synthetic quartz glass substrate is machined by bringing a surface of the synthetic quartz glass substrate as the workpiece into contact with and superposing it on a surface of a protective member made of synthetic quartz glass to effect optical contact bonding of the workpiece and the protective member, and passing a cutting tool through the optical contact bonding surfaces. This machining process is able to effectively prevent the generation of microdefects at the cutting tool entry site and extraction site during a cutting operation. Moreover, a fixing agent is not used to join the workpiece and the protective member, and so productivity is high because there is no need for the application and later removal of a fixing agent.
Claims12
A method for machining a synthetic quartz glass substrate, comprising the steps of:
- furnishing a synthetic quartz glass substrate as a workpiece;
- furnishing a protective member for protecting the workpiece, the protective member made of synthetic quartz glass;
- optical contact bonding the workpiece and the protective member by bringing a surface of the protective member into contact with and superposing a surface of the protective member on a surface of the workpiece, so that an optical contact bonding surface is formed between the workpiece and the protective member;
- and
- cutting the synthetic quartz glass substrate by passing a cutting tool i) from a protective member side and through the optical contact bonding surface to a synthetic quartz glass substrate side, thereby forming a through-hole or a slit in the protective member, or ii) both from the protective member side and through the optical contact bonding surface to the synthetic quartz glass substrate side, thereby forming a through-hole or a slit in the protective member, and also from the synthetic quartz glass substrate side and through the optical contact bonding surface to the protective member side.
A method for machining synthetic quartz glass substrates, comprising the steps of:
- furnishing a plurality of synthetic quartz glass substrates;
- optical contact bonding the plurality of synthetic quartz glass substrates by mutually contacting and superposing surfaces of the respective synthetic quartz glass substrates to give a workpiece, so that an optical contact bonding surface is formed between the synthetic quartz glass substrates;
- furnishing a first protective member and a second protective member for protecting the workpiece, each of the first and second protective members made of synthetic quartz glass;
- optical contact bonding the workpiece and the first and second protective members by i) bringing a surface of the first protective member into contact with and superposing the surface of the first protective member on a surface of the workpiece, and ii) by bringing a surface of the second protective member into contact with and superposing the surface of the second protective member on another surface of the workpiece, so that the workpiece is sandwiched between the first and second protective members and optical contact bonding surfaces are formed between the workpiece and the first and second protective members;
- and
- cutting the synthetic quartz glass substrates by passing a cutting tool i) from a first protective member side and through the optical contact bonding surfaces thereof to a workpiece side at the synthetic quartz glass substrate spaced furthest from the first protective member, thereby forming a through-hole or a slit in the first protective member, or ii) from a second protective member side and through the optical contact bonding surfaces thereof to a workpiece side at the synthetic quartz glass substrate spaced furthest from the second protective member thereby forming a through-hole or a slit in the second protective member.
A method for machining a synthetic quartz glass substrate, comprising the steps of:
- furnishing a synthetic quartz glass substrate as a workpiece;
- furnishing a protective member for protecting the workpiece, the protective member made of synthetic quartz glass;
- optical contact bonding the workpiece and the protective member by bringing a surface of the protective member into contact with and superposing a surface of the protective member on a surface of the workpiece, so that an optical contact bonding surface is formed between the workpiece and the protective member;
- and
- cutting the synthetic quartz glass substrate by passing a cutting tool from the synthetic quartz glass substrate side and through the optical contact bonding surface to the protective member side to form a through-hole or a slit in the protective member and the synthetic quartz glass substrate.
Dependencies are inferred from the claim text.