Imprint apparatus and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsKenji Yaegashi, Takamitsu Komaki
Life of this patent
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AssigneeCanon Kabushiki Kaisha
InventorsKenji Yaegashi, Takamitsu Komaki
Estimating the term…
An imprint apparatus brings an imprint material on a substrate including a first mark into contact with a mold including a second mark and cures the imprint material, thereby forming a cured product of the imprint material on the substrate. The apparatus includes a plurality of detectors used for alignment detection, and a controller configured to obtain a plurality of pieces of relative position information by detecting a relative position between the first mark and the second mark a plurality of times using the plurality of detectors in a state in which the imprint material is cured and a positional relationship between the substrate and the mold is maintained, and to calibrate, based on the plurality of pieces of relative position information, a plurality of detection processing operations each performed using each of the plurality of detectors.
An imprint apparatus that brings an imprint material on a substrate including a first mark into contact with a mold including a second mark and cures the imprint material, thereby forming a cured product of the imprint material on the substrate, comprising:
Dependencies are inferred from the claim text.