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US 11,673,108 B2Granted
Surface modifying device
AssigneeKasuga Denki, Inc.
InventorsSatoru Ogiso, Takao Morishita, Yukihira Sakurai, Junya Yoshida, Satoshi Sugimura
Life of this patent
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Abstract
A discharge electrode E in an electrode chamber C comprises a plurality of electrode members 8, 9. The electrode members 8, 9 are disposed facing each other by having a supporting member 4 therebetween, a gap is formed between the facing portions of the electrode members 8, 9, and by having the gap as a gas passageway 15, the gas passageway is opened in the leading end of the discharge electrode. A replacement gas having been supplied from a manifold pipe 3 is supplied to the gas passageway 15 via an orifice.
Claims17
A surface modifying device, comprising:
- holding means for holding a base material to undergo surface modifying treatment;
- an electrode chamber;
- a manifold pipe that is secured to the electrode chamber through a coupling member and connected to a gas supply source;
- a discharge electrode that includes a plurality of electrode members comprising adjacent face-to-face electrode members, the plurality of electrode members being supported either directly or via a supporting member by the manifold pipe, and maintained in length in a width direction of the base material;
- a counter electrode that is disposed on the opposite side of the base material from the discharge electrode to face the discharge electrode, and allows an electric field to be generated between the discharge electrode and the counter electrode;
- a gas passageway that is formed between the adjacent face-to-face electrode members of the plurality of electrode members of the discharge electrode, the gas passageway guiding replacement gas along the electrode members toward the base material, and ejecting the replacement gas toward a generation area of the electric field;
- and
- orifices continuously disposed in a length direction of the manifold pipe, the orifices located between the gas passage and an inside of the manifold pipe;
- wherein the manifold pipe constitutes a support mechanism for the discharge electrode.
6 more elements
Dependencies are inferred from the claim text.