Surface treatment agent and surface-treated body manufacturing method

A surface treatment agent for surface treatment of a workpiece, comprising the following components:

• (I) at least one compound selected from the group consisting of silicon compounds represented by the following general formulas [1], [2] and [3];
• (II) at least one compound selected from the group consisting of a nitrogen-containing heterocyclic compound represented by the following general formula [4], a nitrogen-containing heterocyclic compound represented by the following general formula [5], and imidazole;
• and
• (III) an organic solvent
• (R1)a(H)bSi[N(R2)C(═O)R3]4-a-b [1]
• where R1 is each independently a monovalent hydrocarbon group of 1 to 18 carbon atoms in which a part or all of hydrogen atoms may be substituted with a fluorine atom;
• R2 is each independently a group selected from the group consisting of an alkyl group of 1 to 6 carbon atoms in which a part or all of hydrogen atoms may be substituted with a fluorine atom, and a hydrogen atom;
• R3 is each independently an alkyl group of 1 to 6 carbon atoms in which a part or all of hydrogen atoms may be substituted with a fluorine atom;
• a is an integer of 1 to 3;
• b is an integer of 0 to 2;
• and the sum of a and b is 1 to 3,
• (R4)c(H)dSi[OC(═O)R5]4-c-d [2]
• where R4 is each independently a monovalent hydrocarbon group of 1 to 18 carbon atoms in which a part or all of hydrogen atoms may be substituted with a fluorine atom;
• R5 is each independently an alkyl group of 1 to 6 carbon atoms in which a part or all of hydrogen atoms may be substituted with a fluorine atom;
• c is an integer of 1 to 3;
• d is an integer of 0 to 2;
• and the sum of c and d is 1 to 3,
• (R6)e(H)fSi[OC(R7)═NSi(R8)g(H)3-g]4-e-f [3]
• where R6 and R8 are each independently a monovalent hydrocarbon group of 1 to 18 carbon atoms in which a part or all of hydrogen atoms may be substituted with a fluorine atom;
• R7 is each independently a group selected from the group consisting of an alkyl group of 1 to 6 carbon atoms in which a part or all of hydrogen atoms may be substituted with a fluorine atom, and a hydrogen atom;
• e is an integer of 1 to 3;
• f is an integer of 0 to 2;
• g is an integer of 1 to 3;
• and the sum of e and f is 1 to 3,
• where R9 and R10 are each independently a divalent organic group consisting of carbon and/or nitrogen and hydrogen;
• the total number of carbon and nitrogen atoms in the divalent organic group is 1 to 9;
• and, when the total number of carbon and nitrogen atoms in the divalent organic group is 2 or more, there may be present any carbon atom without constituting a cyclic structure, and
• where R11 is an alkyl group of 1 to 6 carbon atoms in which a part or all of hydrogen atoms may be substituted with a fluorine atom, an alkenyl group of 2 to 6 carbon atoms in which a part or all of hydrogen atoms may be substituted with a fluorine atom, an alkoxy group of 1 to 6 carbon atoms in which a part or all of hydrogen atoms may be substituted with a fluorine atom, an amino group, an alkylamino group having an alkyl group of 1 to 6 carbon atoms in which a part or all of hydrogen atoms may be substituted with a fluorine atom, a dialkylamino group having an alkyl group of 1 to 6 carbon atoms in which a part or all of hydrogen atoms may be substituted with a fluorine atom, an aminoalkyl group of 1 to 6 carbon atoms in which a part or all of hydrogen atoms may be substituted with a fluorine atom, a nitro group, a cyano group, a phenyl group, a benzyl group, or a halogen atom;
• R12, R13 and R14 are each independently an alkyl group of 1 to 6 carbon atoms in which a part or all of hydrogen atoms may be substituted with a fluorine atom, or a hydrogen atom.