Method for processing a substrate by using fluid flowing through a particle detector
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsEn-Tian Lin, Chwen Yu, Mei Lee, Shu-Yu Hsu
Life of this patent
Estimating the term…
Abstract
A method for processing a substrate by using fluid flowing through a particle detector is provided. The particle detector is utilized to detect nano-particles contained in fluid. The particle detector includes a substrate and a pair of sensing electrodes disposed on the substrate. The substrate includes nano-pores, wherein the pore size of the nano-pores is greater than the particle size of the nano-particles, allowing the nano-particles contained in the fluid passing through the nano-pores. The pair of sensing electrodes are positioned adjacent to at least one of the nano-pores.
Claims20
A method, comprising:
- performing a process on a first substrate with a fluid flowing through a particle detector, the particle detector comprising a second substrate and a pair of sensing electrodes in contact with the second substrate, the second substrate comprising nano-pores, a pore size of the nano-pores being greater than a particle size of nano-particles in the fluid, allowing the nano-particles in the fluid passing through the nano-pores, the pair of sensing electrodes being positioned adjacent to a sensing nano-pore among the nano-pores, and the pair of sensing electrodes being not positioned adjacent to a dummy nano-pore among the nano-pores.
A method, comprising:
- performing a process on a first substrate with a fluid, nano-particles in the fluid being monitored by a particle detector, the particle detector comprising a second substrate and pairs of sensing electrodes in contact with the second substrate, the second substrate comprising sensing nano-pores and dummy nano-pores, a pore size of the sensing nano-pores and a pore size of the dummy nano-pores being greater than a particle size of nano-particles, allowing the nano-particles passing through the sensing nano-pores and the dummy nano-pores, each pair of sensing electrodes being positioned adjacent to one of the sensing nano-pores respectively, and the pairs of sensing electrodes are not positioned adjacent to a dummy nano-pore among the nano-pores.
A method, comprising:
- performing a process on a substrate to be processed with a fluid, nano-particles in the fluid being monitored by a particle detector, and the particle detector comprising:
- a first substrate comprising first nano-pores, wherein a pore size of the first nano-pores is greater than a particle size of the nano-particles, allowing the nano-particles in the fluid passing through the plurality of first nano-pores;
- at least one pair of first sensing electrodes in contact with the first substrate, and the at least one pair of first sensing electrodes being positioned adjacent to at least one of the first nano-pores;
- a second substrate comprising second nano-pores, the second substrate being spaced apart from the first substrate, wherein a pore size of the second nano-pores is greater than the particle size of the nano-particles, allowing the nano-particles in the fluid passing through the second nano-pores;
- and
- at least one pair of second sensing electrodes disposed on the second substrate, and the at least one pair of second sensing electrodes being positioned adjacent to at least one of the second nano-pores.
Dependencies are inferred from the claim text.