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US 11,668,005 B2Granted
Manufacturing of coated items
AssigneePicosun Oy
InventorsJani Kivioja, Marko Pudas
Life of this patent
Estimating the term…
Abstract
A method for manufacturing a coated item 10 in a chemical deposition reactor and a coated item produced by the method are provided. The method includes deposition of a first coating on a first surface of the item 10, and/or deposition of a second coating on a second surface of the item.
Claims14
A method for manufacturing a coated interlaced substrate in a chemical deposition reactor, comprising:
- obtaining a chemical deposition reactor with a reaction space formed by a reaction chamber and configured to receive, at least in part, a substrate holder made of a fluid-permeable material, onto which an interlaced substrate is mounted such that a first surface of the substrate faces the reaction space, and a second surface of the substrate is placed against the substrate holder, and
- in a number of deposition cycles, forming a first coating on the first surface and/or forming a second coating on the second surface,
- wherein, each deposition cycle comprises delivering, with a flow of fluid, a precursor chemical into the reaction space such that delivery of at least one precursor chemical into the reaction space occurs via said fluid-permeable material.
Dependencies are inferred from the claim text.