Apparatus and method for producing porous glass preform
AssigneeShin-Etsu Chemical Co., Ltd.
InventorNaoto Noda
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Abstract
A method and an apparatus for producing a porous glass preform by using organosiloxane raw material is provided. The apparatus for producing the porous glass preform 12 according to the present embodiment is configured to mix organosiloxane in a liquid state being a raw material with a carrier gas in a vaporizer 6, heat this mixture to be vaporized, supply this vapor to a burner 13 as a gas raw material, and produce a porous glass preform by depositing a glass fine particle produced by combusting the gas raw material on a starting material, herein the apparatus for producing a porous glass preform includes a moisture removing apparatus 8 configured to remove moisture in the carrier gas and supply the vaporizer with the carrier gas.
Claims13
A method for producing a glass preform, comprising:
- reducing a moisture concentration in a carrier gas with a dryer;
- providing the carrier gas from a mass flow controller through two parallel carrier gas supplying pipelines, wherein each of the two parallel carrier gas supplying pipelines have a moisture-reducing apparatus;
- further reducing the moisture concentration in the carrier gas with the moisture-reducing apparatus in a selected one of the two parallel carrier gas supplying pipelines to 3 volppm or less;
- measuring a dew-point with a dew-point hygrometer on a downstream side of the two parallel carrier gas supplying pipelines;
- actuating at least one valve to switch use between one or the other of the two parallel carrier gas supplying pipelines based on an output of the dew-point hygrometer;
- mixing organosiloxane in a liquid state being a raw material with the carrier gas having reduced moisture concentration in a vaporizer;
- heating this mixture to be vaporized;
- supplying this vapor to a burner as a gas raw material;
- depositing a glass fine particle produced by combusting the gas raw material on a starting material and thereby producing a porous glass preform;
- and sintering the porous glass preform.
Dependencies are inferred from the claim text.