Optical electronics device
AssigneeTexas Instruments Incorporated
InventorSimon Joshua Jacobs
Life of this patent
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Abstract
An optical electronics device includes first, second and third wafers. The first wafer has a semiconductor substrate with a dielectric layer on a side of the semiconductor substrate. The second wafer has a transparent substrate with an anti-reflective coating on a side of the transparent substrate. The first wafer is bonded to the second wafer at a silicon dioxide layer between the semiconductor substrate and the anti-reflective coating. The first and second wafers include a cavity extending from the dielectric layer through the semiconductor substrate and through the silicon dioxide layer to the anti-reflective coating. The third wafer includes micromechanical elements. The third wafer is bonded to the dielectric layer, and the micromechanical elements are contained within the cavity.
Claims20
A device comprising:
- a semiconductor layer;
- a transparent layer over the semiconductor layer;
- a patterned metal layer on a side of the transparent layer, the patterned metal layer having a window aperture;
- a device layer;
- and
- a dielectric layer between the device layer and the semiconductor layer, a cavity extending from the semiconductor layer and through the dielectric layer.
A device comprising:
- a semiconductor layer;
- a transparent layer over the semiconductor layer;
- a patterned metal layer on a side of the transparent layer, the patterned metal layer having a window aperture;
- a dielectric layer between the transparent layer and the semiconductor layer, a cavity extending from the semiconductor layer and through the dielectric layer;
- and
- a device layer below the semiconductor layer, a microelectromechanical system (MEMS) device on the device layer in the cavity.
A device comprising:
- a semiconductor layer;
- a first dielectric layer on the semiconductor layer;
- a transparent layer over the first dielectric layer;
- a patterned metal layer between the first dielectric layer and the transparent layer, the patterned metal layer having a window aperture;
- and
- a second dielectric layer below the semiconductor layer, a cavity extending from the first dielectric layer through the semiconductor layer and through the second dielectric layer.
Dependencies are inferred from the claim text.