Method of polishing a surface of a waveguide
AssigneeLumus Ltd.
InventorsAmit Maziel, Naamah Levin, Lilya Lobachinsky, Yochay Danziger
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AssigneeLumus Ltd.
InventorsAmit Maziel, Naamah Levin, Lilya Lobachinsky, Yochay Danziger
Estimating the term…
A method of polishing a target surface of a waveguide to achieve perpendicularity relative to a reference surface is disclosed. The method includes i) providing a polishing apparatus having a polishing plate with a flat surface defining a reference plane, and an adjustable mounting apparatus configured to hold the waveguide during polishing at a plurality of angular orientations; ii) positioning an optical alignment sensor and a light reflecting apparatus such that a first collimated light beam is reflected off of a surface parallel to the reference plane, and a second perpendicular collimated light beam is reflected off of the reference surface; iii) aligning the waveguide within the polishing apparatus such that the reflections received by the optical alignment sensor align within the optical alignment sensor, thereby being indicative of perpendicularity between the reference plane and the reference surface; and iv) polishing the target surface of the aligned waveguide.
A method of polishing a target surface of a waveguide to achieve accurate perpendicularity of the target surface relative to at least one reference surface of the waveguide, the method comprising:
A method of polishing a target surface of a waveguide to achieve accurate perpendicularity of the target surface relative to two non-parallel surfaces of the waveguide, the method comprising:
Dependencies are inferred from the claim text.